Steering effects on growth instability during step-flow growth of Cu on Cu(1,1,17)

摘要

Kinetic Monte Carlo simulation in conjunction with molecular dynamicssimulation is utilized to study the effect of the steered deposition on thegrowth of Cu on Cu(1,1,17). It is found that the deposition flux becomesinhomogeneous in step train direction and the inhomogeneity depends on thedeposition angle, when the deposition is made along that direction. Steeringeffect is found to always increase the growth instability, with respect to thecase of homogeneous deposition. Further, the growth instability depends on thedeposition angle and direction, showing minimum at a certain deposition angleoff-normal to (001) terrace, and shows a strong correlation with theinhomogeneous deposition flux. The increase of the growth instability isascribed to the strengthened step Erlich Schwoebel barrier effects that iscaused by the enhanced deposition flux near descending step edge due to thesteering effect.